Title :
Measurement techniques for evaluating thin-film piezoelectric transducers
Author :
Bahr, Alexander ; Reeder, T.
Author_Institution :
Stanforth Research Institute, Menlo Park, CA, USA
Keywords :
Coupling circuits; Equations; Equivalent circuits; Frequency; Loss measurement; Measurement techniques; Piezoelectric films; Piezoelectric materials; Piezoelectric transducers; Zinc oxide;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1968 IEEE International
Conference_Location :
Philadelphia, PA, USA
DOI :
10.1109/ISSCC.1968.1154600
