Title :
Microwave characterization of intrinsically tunable FBARs
Author :
Vorobiev, A. ; Gevorgian, S.
Author_Institution :
Department of Microtechnology and Nanoscience, Chalmers University of Technology, 41296 Gothenburg, Sweden
Abstract :
Unlike the traditional piezoelectric film (AlN, ZnO etc.) based FBARs, the experimental characterization of the tunable ferroelectric FBARs typically start with low frequency DC measurements. In this work wide band microwave measurements are used to generate DC dependent analytic approximations for the parameters of the BVD model. Mason´s model and curve fitting procedure is used to extract the DC bias dependent acousto-electric material parameters of the ferroelectric films.
Keywords :
Analytical models; Microwave measurements; Zinc oxide; BAW; BVD model; FBAR; Mason model; acoustic resonator; microwave measurement;
Conference_Titel :
Microwave Symposium Digest (MTT), 2012 IEEE MTT-S International
Conference_Location :
Montreal, QC, Canada
Print_ISBN :
978-1-4673-1085-7
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2012.6258383
