Title :
Contact resistance on diffused resistors
Author_Institution :
IBM Labs., Boeblingen, Germany
Abstract :
The electrical behavior of contacts on diffused resistors can be explained by an equivalent transmission line. What contributes to the contact resistance and how the contacts can be optimized will be discussed in this paper.
Keywords :
Circuits; Conductivity; Contact resistance; Electric resistance; Electrical resistance measurement; Equations; Length measurement; Proximity effect; Resistors; Surface resistance;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1969 IEEE Internationa
Conference_Location :
Philadelphia, PA, USA
DOI :
10.1109/ISSCC.1969.1154702
