New PZT actuator using piezoelectric thin film on parallel plate structure

Author

Sato, Hiroshi ; Arai, Fumihito ; Ishihara, Hidenori ; Fukuda, Toshio ; Iwata, Hitoshi ; Itoigawa, Kouichi

Author_Institution

Dept. of Micro. Syst. Eng., Nagoya Univ., Japan

fYear

1997

fDate

1997

Firstpage

79

Lastpage

84

Abstract

The parallel beam structure and the hydrothermal method have many significant features. Combining these features, we made a PZT microactuator by the hydrothermal method on the parallel beam structure. The basic properties of the prototype are investigated. We propose applications of this actuator: the multi degrees of freedom actuator, G-sensor, and vibration gyroscope. Finally, we measured the relationship between output-voltage and rotation

Keywords

crystal growth from solution; lead compounds; microactuators; piezoelectric actuators; piezoelectric thin films; 3D structure; G-sensor; PZT; PbZrO3TiO3; hydrothermal method; macro model actuator; microactuator; multi degrees of freedom actuator; output-voltage and rotation relationship; parallel beam structure; parallel plate structure; piezoelectric actuator; piezoelectric thin film; vibration gyroscope; Grain size; Piezoelectric actuators; Piezoelectric effect; Piezoelectric films; Piezoelectric polarization; Sputtering; Stress; Structural beams; Systems engineering and theory; Titanium compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Micromechatronics and Human Science, 1997. Proceedings of the 1997 International Symposium on

Conference_Location

Nagoya

Print_ISBN

0-7803-4171-6

Type

conf

DOI

10.1109/MHS.1997.768861

Filename

768861