Title :
New PZT actuator using piezoelectric thin film on parallel plate structure
Author :
Sato, Hiroshi ; Arai, Fumihito ; Ishihara, Hidenori ; Fukuda, Toshio ; Iwata, Hitoshi ; Itoigawa, Kouichi
Author_Institution :
Dept. of Micro. Syst. Eng., Nagoya Univ., Japan
Abstract :
The parallel beam structure and the hydrothermal method have many significant features. Combining these features, we made a PZT microactuator by the hydrothermal method on the parallel beam structure. The basic properties of the prototype are investigated. We propose applications of this actuator: the multi degrees of freedom actuator, G-sensor, and vibration gyroscope. Finally, we measured the relationship between output-voltage and rotation
Keywords :
crystal growth from solution; lead compounds; microactuators; piezoelectric actuators; piezoelectric thin films; 3D structure; G-sensor; PZT; PbZrO3TiO3; hydrothermal method; macro model actuator; microactuator; multi degrees of freedom actuator; output-voltage and rotation relationship; parallel beam structure; parallel plate structure; piezoelectric actuator; piezoelectric thin film; vibration gyroscope; Grain size; Piezoelectric actuators; Piezoelectric effect; Piezoelectric films; Piezoelectric polarization; Sputtering; Stress; Structural beams; Systems engineering and theory; Titanium compounds;
Conference_Titel :
Micromechatronics and Human Science, 1997. Proceedings of the 1997 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-4171-6
DOI :
10.1109/MHS.1997.768861
