Abstract :
The following topics are dealt with: VLSI technology; VLSI manufacture; three-dimensional integrated circuits; non-volatile memory; semiconductor productivity; BlueGene supercomputer; cell broadband engine; silicon photonics; flash memory; metal gate/high-k stack; reliability; characterization; non-planar CMOS; process/BEOL; and simulation/modeling of advanced devices.
Keywords :
CMOS integrated circuits; VLSI; flash memories; integrated circuit reliability; integrated circuit technology; integrated circuit yield; integrated optics; parallel machines; semiconductor device manufacture; BlueGene supercomputer; VLSI manufacture; VLSI technology; advanced devices; cell broadband engine; flash memories; metal gate/high-k stack; nonplanar CMOS; nonvolatile memories; process/BEOL; reliability; semiconductor productivity; silicon photonics; three-dimensional integrated circuits;
Conference_Titel :
VLSI Technology, Systems and Applications, 2007. VLSI-TSA 2007. International Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
1-4244-0584-X
DOI :
10.1109/VTSA.2007.378891
