Title :
Chemisorption getter pump
Author :
Monakhov, V.N. ; Popov, V.F. ; Krasilnikova, V.P.
Author_Institution :
CSRI Elektropribor, St. Petersburg, Russia
Abstract :
It is possible to maintain high vacuum in small volume devices during long term service using getter pumps connected to the devices. There is no magnetic system in the pump. Electrical energy is not needed when the pump is in operation. The micropumps work on the principle of chemisorption of residual chemically active gases. Regimes of degassing and pore titanium gas-adsorber activation were determined
Keywords :
chemisorption; getters; micropumps; vacuum pumps; chemisorption getter pump; degassing; high vacuum; micropumps; pore titanium gas-adsorber activation; residual chemically active gases; small volume devices; Assembly; Chemicals; Gettering; Micropumps; Powders; Resistance heating; Surface treatment; Temperature; Titanium; Welding;
Conference_Titel :
Electronic Instrument Engineering Proceedings, 1998. APEIE-98. Volume 1. 4th International Conference on Actual Problems of
Conference_Location :
Novosibirsk
Print_ISBN :
0-7803-4938-5
DOI :
10.1109/APEIE.1998.768908
