DocumentCode :
2849041
Title :
Large scale self-assembly of crystalline semiconductor microcomponents onto plastic substrates via microfluidic traps
Author :
Kim, Samuel S. ; Saeedi, Ehsan ; Etzkorn, James R. ; Parviz, Babak A.
Author_Institution :
Dept. of Electr. Eng., Washington Univ., Seattle, WA
fYear :
2008
fDate :
23-26 Aug. 2008
Firstpage :
967
Lastpage :
970
Abstract :
We present high-yield self-assembly results of silicon microcomponents assembled onto plastic substrates. The self-assembly is achieved by engineering the fluid flow over the substrate containing an array of microfluidic traps. This simple self-assembly method has demonstrated physical yields exceeding 90% as well as electrical connections between the microcomponents and the substrate. Using templates with 1250 binding sites, we were able to study the statistical nature of the self-assembly process experimentally and determine two exponential spatial and temporal trends affecting the overall yield.
Keywords :
elemental semiconductors; microassembling; microfluidics; packaging; self-assembly; silicon; Si; crystalline semiconductor microcomponents; fluid flow; high-yield self-assembly results; microfluidic traps; plastic substrates; Crystallization; Etching; Fluid flow; Glass; Large-scale systems; Microfluidics; Plastics; Self-assembly; Silicon; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Automation Science and Engineering, 2008. CASE 2008. IEEE International Conference on
Conference_Location :
Arlington, VA
Print_ISBN :
978-1-4244-2022-3
Electronic_ISBN :
978-1-4244-2023-0
Type :
conf
DOI :
10.1109/COASE.2008.4626552
Filename :
4626552
Link To Document :
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