Methods of control of technological process of an electronic irradiation of power semiconductor devices (PSD)

The technological process of electronic irradiation is applied in batch production of power semiconductor devices (PSDs) for improving their dynamic characteristics. As the capacities of converters have been growing and because of the necessity to use PSD at parallel and series connections, PSDs should have values of on-state voltage (U_tm) and reverse recovery charge (Q_rr) that differ from each other by the preset value but no more. The authors develop methods of regulation of the values of Q_rr and U_tm of semiconductor devices with preset precision