DocumentCode
2849295
Title
Analysis of HF plasma generator power parameters
Author
Geller, V.M. ; Khrustalev, V.A.
fYear
1998
fDate
1998
Firstpage
106
Lastpage
112
Abstract
The generalized optimisation analysis of HF hybrid plasma generator parameters, HF and HFC devices being particular cases, is given in this paper. The circuit theory method without regard for gas dynamics features was used
Keywords
gas-discharge tubes; high-frequency discharges; optimisation; plasma devices; plasma production; Debye radius; HF plasma generator; circuit theory method; cold losses; generalized optimisation analysis; hot capacity; hybrid plasma generator parameters; loop efficiency; power parameters analysis; Character generation; Hafnium; Inductors; Industrial economics; Instruments; Plasma applications; Plasma devices; Plasma properties; Power generation; Resonance;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Instrument Engineering Proceedings, 1998. APEIE-98. Volume 1. 4th International Conference on Actual Problems of
Conference_Location
Novosibirsk
Print_ISBN
0-7803-4938-5
Type
conf
DOI
10.1109/APEIE.1998.768924
Filename
768924
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