Analysis of Response of the Micro-Machined Poly-Silicon Cantilever Subjected to Vibration Environment

Author

Xu, Xiaoling ; Tang, Jieying

Author_Institution

Key Lab. of MEMS of Educ. Minis., Southeast Univ., Nanjing

fYear

2005

fDate

2-2 Sept. 2005

Firstpage

1

Lastpage

5

Abstract

With the decrease in the dimension the microstructure, the effect of the interaction between the surfaces of the neighboring structures on the dynamic characteristics cannot be ignored. We present a comparison of the dynamic responses of the beam with and without considering the adhesive forces by simulating the dynamic behavior of the beam with a commercial software ANSYS. With the effect of the adhesive forces, the dynamic characteristics of the beam deviate from that of the beam without considering the adhesive forces. The reliability and the precision of the MEMS products using cantilevers are diminished

Keywords

beams (structures); cantilevers; failure analysis; micromechanical devices; ANSYS software; MEMS products; adhesive forces; cantilevers; dynamic characteristics; dynamic responses; polysilicon cantilever; response analysis; vibration environment; Atomic measurements; Equations; Force measurement; Guidelines; Instruments; Micromechanical devices; Microstructure; Reliability theory; Structural beams; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Packaging Technology, 2005 6th International Conference on

Conference_Location

Shenzhen

Print_ISBN

0-7803-9449-6

Type

conf

DOI

10.1109/ICEPT.2005.1564663

Filename

1564663