Packaging technology of polymer/Si arrayed waveguide grating and their environmental stability

In this paper we present the fabrication process and the measuring result of a 32 channel fluorinated FPEEK AWG multiplexer at the central wavelength of 1550 nm. For our AWG, the insertion loss is 12.8-17.8 dB and the crosstalk less than -20 dB. We fabricated the AWG multiplexer by spin coating, photolithographic patterning and reactive ion etching (RIE). The roughness of polymer waveguide endface was reduced by polishing. The polymer AWG´s package technology and environmental stability were also discussed.