Title :
Analysis of electrothermal integrated circuits
Author :
Gray, P. ; Hamilton, Dean
Author_Institution :
Fairchild Semiconductor, Palo Alto, CA, USA
Abstract :
This paper will present an analysis for the time-dependent temperature distribution and the frequency response of electrothermal filters realized using silicon chips. Basic properties, limitations, and experimental results for electrothermal-integrated circuit filters will be examined. A synthesis procedure, which results in geometrical configurations compatible with monolithic-processing techniques, will be discussed.
Keywords :
Electrothermal effects; Filters; Fourier transforms; Heat transfer; Insulation; Laplace equations; Silicon; Temperature sensors; Thermal sensors; Transfer functions;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1970 IEEE International
Conference_Location :
Philadelphia, PA, USA
DOI :
10.1109/ISSCC.1970.1154871
