Title :
Preparation of micro fluidic chip based on SU-8 mold
Author :
Wu, Yuan-Qing ; Yao, Su-Ying
Author_Institution :
Sch. of Electron. & Inf. Eng., Tianjin Univ., Tianjin, China
Abstract :
As the silicon mold has rough edges, microchip is not conducive to fluid movement. In this paper, mold was produced by SU-8, and a set of production process was given. Then this paper made anti-stick layer on the mold, in order to improve mold re-use rate. Author discussed the impact of curing temperature and the ratio of PDMS and curing agent on the device, and does modification on casting PDMS, then seal to complete the microarray.
Keywords :
casting; curing; microfluidics; moulding; PDMS casting; SU-8 mold; antistick layer; curing agent; curing temperature; microarray; microfluidic chip preparation; mold reuse rate; production process; silicon mold; Curing; Fluidic microsystems; Microfluidics; Polymers; Silicon; Surface treatment; PDMS; SU-8; micro fluidics;
Conference_Titel :
Electron Devices and Solid-State Circuits (EDSSC), 2011 International Conference of
Conference_Location :
Tianjin
Print_ISBN :
978-1-4577-1998-1
Electronic_ISBN :
Pending
DOI :
10.1109/EDSSC.2011.6117676
