Title :
An IC piezoresistive pressure sensor for biomedical instrumentation
Author :
Samaun, S. ; Wise, K. ; Nielsen, E. ; Angell, J.
Author_Institution :
Stanford University, Stanford, CA, USA
Abstract :
A thin-diaphragm diffused piezoresistive pressure sensor has been developed for biomedical instrumentation using monolithic IC techniques. Anisotropic etching affords large-area, 5μ thick diaphragms with high yield, and simple temperature compensation eliminates residual temperature drift.
Keywords :
Biomedical measurements; Biomedical transducers; Biosensors; Bridge circuits; Etching; Fabrication; Piezoresistance; Resistors; Silicon; Temperature sensors;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1971 IEEE International
Conference_Location :
Philadelphia, PA, USA
DOI :
10.1109/ISSCC.1971.1154987
