An efficient and accurate MEMS accelerometer model with sense finger dynamics for applications in mixed-technology control loops

This contribution presents a novel MEMS accelerometer model implemented in VHDL-AMS. The model includes sense finger dynamics, which allow accurate performance prediction of a MEMS accelerometer in a mixed-technology control loop. A distributed mechanical sensing element model is developed and the effect of the sense finger dynamics is analyzed. The sense finger dynamics might cause a failure of the Sigma-Delta control loop which is captured by the proposed model but cannot be correctly modeled using the conventional approach.