• DocumentCode
    2852635
  • Title

    Evolution and expansion of SOI in VLSI technologies: Planar to 3D

  • Author

    Patton, G.

  • fYear
    2012
  • fDate
    1-4 Oct. 2012
  • Firstpage
    1
  • Lastpage
    40
  • Abstract
    SOI has enabled industry leadership in planar CMOS exemplified by both digital and analog mixed-signal applications. Innovative future opportunities for SOI as Industry moves to Fully Depleted Architectures and beyond Uniformity and Variability control are at the forefront! Paradigm shift in SOI value proposition as FinFET era arrives.
  • Keywords
    CMOS integrated circuits; MOSFET; VLSI; mixed analogue-digital integrated circuits; silicon-on-insulator; FinFET; SOI; VLSI technology; analog mixed-signal application; digital mixed-signal application; full depleted architecture; paradigm shift; planar CMOS; variability control; Conferences; Dielectrics; FinFETs; History; Performance evaluation; Silicon; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SOI Conference (SOI), 2012 IEEE International
  • Conference_Location
    NAPA, CA
  • ISSN
    1078-621X
  • Print_ISBN
    978-1-4673-2690-2
  • Electronic_ISBN
    1078-621X
  • Type

    conf

  • DOI
    10.1109/SOI.2012.6404357
  • Filename
    6404357
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2852635