Title :
Evolution and expansion of SOI in VLSI technologies: Planar to 3D
Abstract :
SOI has enabled industry leadership in planar CMOS exemplified by both digital and analog mixed-signal applications. Innovative future opportunities for SOI as Industry moves to Fully Depleted Architectures and beyond Uniformity and Variability control are at the forefront! Paradigm shift in SOI value proposition as FinFET era arrives.
Keywords :
CMOS integrated circuits; MOSFET; VLSI; mixed analogue-digital integrated circuits; silicon-on-insulator; FinFET; SOI; VLSI technology; analog mixed-signal application; digital mixed-signal application; full depleted architecture; paradigm shift; planar CMOS; variability control; Conferences; Dielectrics; FinFETs; History; Performance evaluation; Silicon; Very large scale integration;
Conference_Titel :
SOI Conference (SOI), 2012 IEEE International
Conference_Location :
NAPA, CA
Print_ISBN :
978-1-4673-2690-2
Electronic_ISBN :
1078-621X
DOI :
10.1109/SOI.2012.6404357
