• DocumentCode
    28534
  • Title

    Silicon-based nanoplasmonic disc resonator on CMOS platform

  • Author

    Nielsen, M.P. ; Elezzabi, A.Y.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Alberta, Edmonton, AB, Canada
  • Volume
    49
  • Issue
    19
  • fYear
    2013
  • fDate
    Sept. 12 2013
  • Firstpage
    1241
  • Lastpage
    1243
  • Abstract
    The first demonstration of a silicon-based metal-insulator-semiconductor (MIS) nanoplasmonic disc resonator monolithically integrated on a CMOS compatible platform is presented. The nanoplasmonic disc resonator is integrated with Au/SiO2/Si MIS nanoplasmonic waveguides and conventional silicon-on-insulator photonic waveguides. The device has a high plasmonic quality (Q) factor of 82.3, one of the highest reported for an integrated silicon-based nanoplasmonic device, with a compact device footprint of only 4 μm2.
  • Keywords
    CMOS integrated circuits; MIS devices; Q-factor; elemental semiconductors; gold; silicon; silicon-on-insulator; Au-SiO2-Si; CMOS compatible platform; Q factor; SOI; compact device footprint; complementary metal-oxide-semiconductor electronics; integrated silicon-based nanoplasmonic device; metal-insulator-semiconductor nanoplasmonic disk resonator; nanoplasmonic waveguides; quality factor; silicon-on-insulator photonic waveguides;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el.2013.2209
  • Filename
    6612805
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=28534