Title :
Backside E-Beam Probing on Nano scale devices
Author :
Schlangen, Rudolf ; Leihkauf, R. ; Kerst, U. ; Boit, Christian ; Jain, R. ; Malik, Tania ; Wilsher, K. ; Lundquist, T. ; Kruger, Bjorn
Author_Institution :
Berlin Univ. of Technol., Berlin
Abstract :
IC debug with E-beam probing is presented in an innovative application accessing the active device directly from chip backside after FIB preparation. The potential of this approach in nanoscale and gigahertz dimensions is evaluated.
Keywords :
electron beam testing; integrated circuit testing; nanoelectronics; backside E-beam probing; innovative application; integrated circuit debug; nano scale devices; Application specific integrated circuits; Floors; Integrated circuit measurements; Optical control; Semiconductor device measurement; Signal generators; Silicon; Stimulated emission; Timing; Voltage measurement;
Conference_Titel :
Test Conference, 2007. ITC 2007. IEEE International
Conference_Location :
Santa Clara, CA
Print_ISBN :
978-1-4244-1127-6
Electronic_ISBN :
1089-3539
DOI :
10.1109/TEST.2007.4437627
