DocumentCode :
2853830
Title :
Optimized Machine Configuring and Job Scheduling Strategy for High Efficiency Semiconductor Manufacturing
Author :
Hu, Zungang ; Yan, Liren ; Zhou, Wei
Author_Institution :
Tsinghua Nat. Lab. for Inf. Sci. & Technol., Tsinghua Univ., Beijing, China
fYear :
2009
fDate :
11-13 Dec. 2009
Firstpage :
1
Lastpage :
4
Abstract :
Machine configuring strategy acts as a crucial role in IC job scheduling. Due to the reentrability of the semiconductor manufacturing processes, it is extremely difficult to configure machines in different workstations. The vast majority of previous researches focus on the scheduling policy under fixed machine configuration. In this paper, a novel machine configuring strategy is introduced. Nonlinear integer programming method is used for configuring machines, and a pipeline based scheduling policy is used for evaluating efficiencies of manufacturing systems. Data from simulation show that a smart configuring strategy may help to minimize the time difference among processing steps, and the scheduling policy under this configuration may successfully achieve highest manufacturing efficiencies.
Keywords :
integer programming; integrated circuit manufacture; job shop scheduling; nonlinear programming; semiconductor device manufacture; IC job scheduling; nonlinear integer programming; optimized machine configuring strategy; pipeline based scheduling; semiconductor manufacturing; Analytical models; Information science; Job shop scheduling; Laboratories; Linear programming; Manufacturing processes; Manufacturing systems; Pipelines; Semiconductor device manufacture; Workstations;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Computational Intelligence and Software Engineering, 2009. CiSE 2009. International Conference on
Conference_Location :
Wuhan
Print_ISBN :
978-1-4244-4507-3
Electronic_ISBN :
978-1-4244-4507-3
Type :
conf
DOI :
10.1109/CISE.2009.5365569
Filename :
5365569
Link To Document :
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