Title :
Real-time modeling of VLSI IC manufacturing processes
Author :
Volk, S.V. ; Koukharenko, S.N. ; Zayats, A.M. ; Smimov, A.G.
Author_Institution :
Belarusian State Univ. of Informatics & Radioelectron., Minsk
Abstract :
Efficient algorithm for modeling of VLSI integrated circuits (IC) manufacturing process is considered. Scheme for organization of time-consuming computations in a separate thread to achieve real-time operation is introduced
Keywords :
VLSI; integrated circuit manufacture; VLSI IC manufacturing process; integrated circuit; real time modeling; time-consuming computation; very large scale integration; CMOS integrated circuits; IEEE catalog; Integrated circuit layout; Integrated circuit modeling; Lithography; Manufacturing processes; Microwave technology; Organizing; Telecommunications; Very large scale integration;
Conference_Titel :
Microwave & Telecommunication Technology, 2005 15th International Crimean Conference
Conference_Location :
Sevastopol, Crimea
Print_ISBN :
966-7968-80-4
DOI :
10.1109/CRMICO.2005.1564988
