• DocumentCode
    2854994
  • Title

    A new methodology for the design centering of IC fabrication processes

  • Author

    Low, K.K. ; Director, S.W.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
  • fYear
    1989
  • fDate
    5-9 Nov. 1989
  • Firstpage
    194
  • Lastpage
    197
  • Abstract
    A practical methodology that can be applied to optimize the process yield of IC fabrication lines is described. The yield maximization problem is first reformulated into a deterministic design centering problem. Macromodeling and problem decomposition are then applied to solve the design centering problem efficiently. The effectiveness of this methodology is illustrated through a simulation example involving a CMOS process adopted from an industrial line.<>
  • Keywords
    CMOS integrated circuits; digital simulation; electronic engineering computing; integrated circuit manufacture; optimisation; CMOS; IC fabrication; decomposition; deterministic design centering; industrial line; process yield; yield maximization; CMOS integrated circuits; CMOS process; Design methodology; Fabrication; Fluctuations; Performance analysis; Process control; Process design; Textile industry; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Computer-Aided Design, 1989. ICCAD-89. Digest of Technical Papers., 1989 IEEE International Conference on
  • Conference_Location
    Santa Clara, CA, USA
  • Print_ISBN
    0-8186-1986-4
  • Type

    conf

  • DOI
    10.1109/ICCAD.1989.76934
  • Filename
    76934