• DocumentCode
    2855307
  • Title

    Ferroelectric film examination at microwaves

  • Author

    Poplavko, Y.M.

  • Author_Institution
    Nat. Tech. Univ. of Ukraine "KPI", Kiev
  • Volume
    2
  • fYear
    2005
  • fDate
    16-16 Sept. 2005
  • Firstpage
    601
  • Abstract
    Various methods of microwave measurement of thin dielectric film with large dielectric permittivity (epsiv~102-104) and increased loss (tandelta~10-2-1) are compared. Non-contacting and non-destructive investigation waveguide method is recommended. This method does not need electrode deposition onto a film surface, so the natural features of film are obtained
  • Keywords
    ferroelectric thin films; microwave measurement; permittivity; waveguides; dielectric permittivity; ferroelectric film examination; microwave measurement; noncontacting waveguide; nondestructive waveguide; thin dielectric film; Dielectric films; Dielectric loss measurement; Dielectric losses; Dielectric measurements; Electrodes; Ferroelectric films; Loss measurement; Microwave measurements; Microwave theory and techniques; Permittivity measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave & Telecommunication Technology, 2005 15th International Crimean Conference
  • Conference_Location
    Sevastopol, Crimea
  • Print_ISBN
    966-7968-80-4
  • Type

    conf

  • DOI
    10.1109/CRMICO.2005.1565054
  • Filename
    1565054
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2855307