Title :
About some methods of nano structures forming in ELIC-technology
Author_Institution :
V. Glushkov Inst. of Cybern., Nat. Acad. of Sci., Kiev
Abstract :
The studies were conducted with various methods of structures forming including nanometer-sized elements resulting in the choosing of the most efficient technological direction, which allows to create a radically new ELIC element base
Keywords :
nanotechnology; semiconductor technology; ELIC technology; nanometer-sized element; Helium; IEEE catalog; Microwave technology; Nanoelectronics; Organizing;
Conference_Titel :
Microwave & Telecommunication Technology, 2005 15th International Crimean Conference
Conference_Location :
Sevastopol, Crimea
Print_ISBN :
966-7968-80-4
DOI :
10.1109/CRMICO.2005.1565067
