DocumentCode
2855515
Title
About some methods of nano structures forming in ELIC-technology
Author
Zolot, A.I.
Author_Institution
V. Glushkov Inst. of Cybern., Nat. Acad. of Sci., Kiev
Volume
2
fYear
2005
fDate
16-16 Sept. 2005
Firstpage
629
Abstract
The studies were conducted with various methods of structures forming including nanometer-sized elements resulting in the choosing of the most efficient technological direction, which allows to create a radically new ELIC element base
Keywords
nanotechnology; semiconductor technology; ELIC technology; nanometer-sized element; Helium; IEEE catalog; Microwave technology; Nanoelectronics; Organizing;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave & Telecommunication Technology, 2005 15th International Crimean Conference
Conference_Location
Sevastopol, Crimea
Print_ISBN
966-7968-80-4
Type
conf
DOI
10.1109/CRMICO.2005.1565067
Filename
1565067
Link To Document