Title :
Composite diamond-AIN dielectric substrates for heatsink materials
Author :
Ralchenko, V. ; Saveliev, A. ; Popovich, A. ; Vlasov, I. ; Voronina, S. ; Ashkinazi, E.
Author_Institution :
Gen. Phys. Inst., Russian Acad. of Sci., Moscow
Abstract :
Polycrystalline diamond films on dielectric AIN ceramic substrates have been produced by microwave plasma CVD process using CH4/H2/O2 reaction gas mixtures. Thermal conductivity of diamond layer, AIN single crystal and AIN ceramics are 1000, 300 and 200 W/cmK, respectively, as measured using laser flash technique. Thus the thermal conductivity of the top layer of AIN heat spreaders can be significantly improved using diamond overcoat
Keywords :
aluminium compounds; ceramics; diamond; dielectric materials; heat sinks; microwave materials; nitrogen compounds; plasma CVD; substrates; thermal conductivity; AlN; chemical vapour deposition; dielectric AlN ceramic substrate; heatsink material; laser flash technique; microwave plasma CVD process; polycrystalline diamond film; thermal conductivity; Ceramics; Composite materials; Conducting materials; Crystalline materials; Dielectric films; Dielectric materials; Dielectric substrates; Electromagnetic heating; Plasma measurements; Thermal conductivity;
Conference_Titel :
Microwave & Telecommunication Technology, 2005 15th International Crimean Conference
Conference_Location :
Sevastopol, Crimea
Print_ISBN :
966-7968-80-4
DOI :
10.1109/CRMICO.2005.1565076
