Title :
CMOS absolute value precision capacitance measurement system
Author :
Leme, C. Azeredo ; Boltshauser, T. ; Baltes, H.
Author_Institution :
Quantum Electron. Inst., Zurich, Switzerland
Abstract :
A switched-capacitor capacitance-to-current converter has been studied and implemented in CMOS technology. It allows the precise measurement of the absolute value of on-chip capacitances, is insensitive to parasitic capacitances to ground, offsets, and charge injection from switches, and can operate up to 500 kHz. The circuit has been integrated together with a test bank of capacitive humidity sensors for their characterization
Keywords :
CMOS integrated circuits; capacitance measurement; convertors; electric sensing devices; humidity measurement; switched capacitor networks; 500 kHz; CMOS technology; SC convertor; absolute value; capacitance-to-current converter; capacitive humidity sensors; on-chip capacitances; precision capacitance measurement system; switched-capacitor; CMOS technology; Capacitance measurement; Charge measurement; Circuit testing; Current measurement; Integrated circuit measurements; Integrated circuit technology; Parasitic capacitance; Switches; Switching converters;
Conference_Titel :
Circuits and Systems, 1992. ISCAS '92. Proceedings., 1992 IEEE International Symposium on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-0593-0
DOI :
10.1109/ISCAS.1992.230272
