Title :
Stress effects in acoustic surface-wave circuits and applications to pressure and force transducers
Author :
Dias, Joana ; Karrer, H.
Author_Institution :
Hewlett-Packard Co., Palo Alto, CA, USA
Abstract :
Delay time changes in a quartz acoustic surface-wave delay line subjected to mechanical stresses have been obtained as variations in frequency of a corresponding ASW delay line oscillator. A simple cantilever structure was found to have the largest sensitivity to stress. Applications to a force and pressure transducer will be described.
Keywords :
Acoustic applications; Acoustic transducers; Circuits; Delay effects; Delay lines; Frequency; Oscillators; Stability; Stress; Surface acoustic waves;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1974 IEEE International
Conference_Location :
Philadelphia, PA, USA
DOI :
10.1109/ISSCC.1974.1155283
