DocumentCode
2857154
Title
Complete stress state measurements in chip on board packages
Author
Zou, Y. ; Suhling, J.C. ; Johnson, R.W. ; Jaeger, R.C.
Author_Institution
Dept. of Mech. Eng., Auburn Univ., AL, USA
fYear
1998
fDate
15-17 Apr 1998
Firstpage
405
Lastpage
415
Abstract
In this work, die stresses in wire bonded chip on board (COB) packages have been measured using special Si(111) stress test chips. The test die contained an array of optimized eight-element dual polarity piezoresistive sensor rosettes, which are uniquely capable of evaluating the complete stress state (6 stress components) at points on the surface of the die. Sensor resistance measurements were recorded before packaging, after die attachment, and throughout the encapsulant cure process. Using the appropriate theoretical equations, the stresses at sites on the die surface have been calculated from the raw sensor resistance data. Also, preliminary three-dimensional nonlinear finite element simulations of the chip on board packages were performed and the stress predictions were correlated with the experimental test chip data
Keywords
electric resistance; electric sensing devices; encapsulation; finite element analysis; heat treatment; integrated circuit measurement; integrated circuit modelling; integrated circuit packaging; internal stresses; lead bonding; piezoresistive devices; stress analysis; stress measurement; thermal stresses; 3D nonlinear finite element simulations; Si; Si(111) stress test chips; chip on board packages; complete stress state; complete stress state measurements; die attachment; die stresses; die surface stresses; eight-element dual polarity piezoresistive sensor rosettes; encapsulant cure process; multiple stress components; packaging; sensor resistance data; sensor resistance measurements; stress predictions; test chip data; test die; wire bonded chip on board packages; Bonding; Electrical resistance measurement; Packaging; Piezoresistance; Semiconductor device measurement; Sensor arrays; Stress measurement; Surface resistance; Testing; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Multichip Modules and High Density Packaging, 1998. Proceedings. 1998 International Conference on
Conference_Location
Denver, CO
Print_ISBN
0-7803-4850-8
Type
conf
DOI
10.1109/ICMCM.1998.670816
Filename
670816
Link To Document