Title :
Lithography versus the device designer and processor
Keywords :
Circuit testing; Costs; Design engineering; Feedback loop; Integrated circuit layout; Job design; Lithography; Manufacturing processes; Process design; Silicon;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1974 IEEE International
Conference_Location :
Philadelphia, PA, USA
DOI :
10.1109/ISSCC.1974.1155297
