Title :
Aging mechanisms in strained Si/high-k based pMOS transistors. Implications in CMOS circuits
Author :
Martin-Martinez, J. ; Amat, E. ; Ayala, N. ; Gonzalez, M.B. ; Verheyen, P. ; Rodriguez, R. ; Nafria, M. ; Aymerich, X. ; Simoen, E.
Author_Institution :
Dept. Eng. Electron., Univ. Autonoma de Barcelona, Bellaterra, Spain
Abstract :
Channel Hot Carrier (CHC) and Negative Bias Temperature Instability (NBTI) degradation has been studied in pMOSFETs with and without channel strain. The results show larger CHC degradation and a neglegible influence of NBTI on strained pMOS devices. The degradation effects are modeled to be introduced in a circuit simulator. The simulations of a CMOS inverter, which has been chosen as example circuit, show that degradation shifts the Voltage Transfer Characteristic (VTC). This effect is higher in strained devices. Concerning to the circuit speed and power consumption, the best initial performance of circuits designed with strained devices compensates their larger degradation.
Keywords :
CMOS integrated circuits; MOSFET; ageing; elemental semiconductors; high-k dielectric thin films; hot carriers; invertors; semiconductor device models; silicon; CHC degradation; CMOS circuits; CMOS inverter simulations; NBTI degradation; Si; aging mechanisms; channel hot carrier; channel strain; circuit simulator; negative bias temperature instability degradation; pMOSFET; power consumption; strained Si-high-k based pMOS transistors; voltage transfer characteristic; Degradation; Integrated circuit modeling; Inverters; MOSFETs; Silicon germanium; Stress; CMOS circuits; Channel Hot Carriers; Negative Bias Temperature Instability; Reliability; Silicon strain;
Conference_Titel :
Electron Devices (CDE), 2011 Spanish Conference on
Conference_Location :
Palma de Mallorca
Print_ISBN :
978-1-4244-7863-7
DOI :
10.1109/SCED.2011.5744167