Title :
High-density static ESFI MOS memory cells
Author :
Goser, K. ; Pomper, M. ; Tihanyi, J.
Author_Institution :
Siemens AG, Munich, Germany
Abstract :
A static CMOS memory cell - 2.4 mil2- with high-rated load resistors using epitaxial silicon films on insulators has been developed. A 4k-bit memory integrated on a 12 mm2chip has been found to show a better overall performance than dynamic memories.
Keywords :
CMOS technology; Diodes; Flip-flops; Insulation; Power supplies; Resistors; Semiconductor films; Silicon on insulator technology; Substrates; Threshold voltage;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1974 IEEE International
Conference_Location :
Philadelphia, PA, USA
DOI :
10.1109/ISSCC.1974.1155330