Linear mode Reach — Through Avalanche Photodiodes for medium energy X-ray detection

Reach-Through Avalanche Photodiodes (RT-APD) for medium energy X-ray detection, with 300 μm thick active region, have been devised, fabricated and characterised at the IMB-CNM clean room. The RT-APD structure and principle of operation are detailed in this paper, together with the main modifications introduced over its general design in order to improve the device performance. The optimisation of these parameters has been made with the aid of TCAD simulations, which suitability is showed here. Finally, the main aspects of the fabrication process and the first characterisation results have been also included.