DocumentCode :
2858689
Title :
Fabrication process of a SU-8 monolithic pressurized microchamber for pressure driven microfluidic applications
Author :
Moreno, J.M. ; Perdigones, F. ; Quero, J.M.
Author_Institution :
Dept. de Ing. Electron., Univ. of Seville, Seville, Spain
fYear :
2011
fDate :
8-11 Feb. 2011
Firstpage :
1
Lastpage :
4
Abstract :
This paper describes a simple and low cost fabrication process to develop monolithic SU-8 pressurized microchambers for pressure driven microfluidic applications. The device consists in a SU-8 hermetic and monolithic structure fabricated over a FR4 substrate which can store pressurized air for several days. With the proposed design and process, the contained pressure can be easily adjusted according to the corresponding fluid impulsion requirements. The structure has been intended to be easily integrated with a microvalve or a micropump that can manage the stored pressure to drive fluids in microfluidic platforms or LOCs, improving the autonomy and portability and avoiding the use of external macroscale pumps.
Keywords :
microfluidics; micropumps; microvalves; substrates; FR4 substrate; SU-8 hermetic structure; SU-8 monolithic pressurized microchamber; fluid impulsion requirements; low cost fabrication process; microfluidic platforms; micropump; microvalve; monolithic SU-8 pressurized microchamber; monolithic structure; pressure driven microfluidic applications; Bonding; Fluids; Microchannel; Microfluidics; Micropumps; Microvalves; Lab on Chip; SU-8; fluid impulsion; microfluidics; portability; pressure driven;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices (CDE), 2011 Spanish Conference on
Conference_Location :
Palma de Mallorca
Print_ISBN :
978-1-4244-7863-7
Type :
conf
DOI :
10.1109/SCED.2011.5744249
Filename :
5744249
Link To Document :
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