Fabrication process of a SU-8 monolithic pressurized microchamber for pressure driven microfluidic applications

This paper describes a simple and low cost fabrication process to develop monolithic SU-8 pressurized microchambers for pressure driven microfluidic applications. The device consists in a SU-8 hermetic and monolithic structure fabricated over a FR4 substrate which can store pressurized air for several days. With the proposed design and process, the contained pressure can be easily adjusted according to the corresponding fluid impulsion requirements. The structure has been intended to be easily integrated with a microvalve or a micropump that can manage the stored pressure to drive fluids in microfluidic platforms or LOCs, improving the autonomy and portability and avoiding the use of external macroscale pumps.