• DocumentCode
    2858948
  • Title

    Modeling, control, and optimization: Critical technologies in semiconductor manufacturing

  • Author

    Poolla, Kameshwar

  • Author_Institution
    University of California at Berkeley, USA
  • fYear
    2008
  • fDate
    3-5 Sept. 2008
  • Firstpage
    20
  • Lastpage
    20
  • Abstract
    Start of the above-titled section of the conference proceedings record.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Computer-Aided Control Systems, 2008. CACSD 2008. IEEE International Conference on
  • Conference_Location
    San Antonio, TX
  • Print_ISBN
    978-1-4244-2221-0
  • Type

    conf

  • DOI
    10.1109/CACSD.2008.4627327
  • Filename
    4627327
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2858948