DocumentCode :
2859646
Title :
Indentation on piezoelectric films in smooth contact with an elastic substrate
Author :
Wu, Ye-fei ; Yu, Hsiang-yung ; Chen, Wei-qiu
Author_Institution :
Dept. of Civil Eng., Zhejiang Univ., Hangzhou, China
fYear :
2010
fDate :
10-13 Dec. 2010
Firstpage :
221
Lastpage :
225
Abstract :
Indentation technique plays an important role in characterizing mechanical properties of advanced materials, especially for those used in applications of MEMS and NEMS. This paper considers the frictionless indentation on piezoelectric films in smooth contact with an elastic substrate. By using Hankel transform, the basic solutions of the piezoelectric film and the elastic half-space can be obtained. Introducing the boundary conditions for singularity caused by the point force, and the interfacial conditions between the film and the substrate, the Green´s function solution can be obtained by solving a set of simultaneous linear algebraic equation. By using the theorem of superposition and the contact boundary conditions, we obtain the dual integral equations, which can be transformed to the Fredholm integral equation and solved numerically. Finally, numerical examples and conclusions are given.
Keywords :
Fredholm integral equations; Green´s function methods; Hankel transforms; elasticity; indentation; linear algebra; piezoelectric thin films; Fredholm integral equation; Green´s function solution; Hankel transform; MEMS; NEMS; contact boundary conditions; dual integral equations; elastic half-space; elastic substrate; frictionless indentation; linear algebraic equation; mechanical properties; piezoelectric films; superposition theorem; Force; Green´s function methods; Integral equations; Piezoelectric films; Solids; Substrates; Green´s function; Indentation; integral equations; piezoelectric film; smooth contact;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA), 2010 Symposium on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-9822-2
Type :
conf
DOI :
10.1109/SPAWDA.2010.5744308
Filename :
5744308
Link To Document :
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