DocumentCode
2860612
Title
A nanometer scale alignment method of concentric spherical mirrors based on interferometry
Author
Yu-juan, Liu ; Yu-guo, Tang ; Chen Shaojie ; Tai, Xu ; Ming-zhong, Pan
Author_Institution
Changchun Inst. of Opt., Fine Mech. & Phys., Chinese Acad. of Sci., Changchun, China
fYear
2011
fDate
21-24 June 2011
Firstpage
1
Lastpage
2
Abstract
A nanometer scale alignment method of spherical concentric mirrors based on dual-beam interferometry is proposed, which is also the method to measure the defocus of concentric spherical mirrors. In the process of aligning the concentric spherical mirrors, the defocus can be measured real time with nanometer scale error. The experimental result shows that the method can achieve the defocus of the spherical concentric mirrors several nanometers.
Keywords
light interferometry; mirrors; concentric spherical mirrors; defocus; dual-beam interferometry; nanometer scale alignment method; nanometer scale error; Adaptive optics; Mirrors; Optical distortion; Optical interferometry; Optical surface waves; Surface waves; Testing; concentric; interferometry; nanometer scale;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanoelectronics Conference (INEC), 2011 IEEE 4th International
Conference_Location
Tao-Yuan
ISSN
2159-3523
Print_ISBN
978-1-4577-0379-9
Electronic_ISBN
2159-3523
Type
conf
DOI
10.1109/INEC.2011.5991621
Filename
5991621
Link To Document