Title :
A nanometer scale alignment method of concentric spherical mirrors based on interferometry
Author :
Yu-juan, Liu ; Yu-guo, Tang ; Chen Shaojie ; Tai, Xu ; Ming-zhong, Pan
Author_Institution :
Changchun Inst. of Opt., Fine Mech. & Phys., Chinese Acad. of Sci., Changchun, China
Abstract :
A nanometer scale alignment method of spherical concentric mirrors based on dual-beam interferometry is proposed, which is also the method to measure the defocus of concentric spherical mirrors. In the process of aligning the concentric spherical mirrors, the defocus can be measured real time with nanometer scale error. The experimental result shows that the method can achieve the defocus of the spherical concentric mirrors several nanometers.
Keywords :
light interferometry; mirrors; concentric spherical mirrors; defocus; dual-beam interferometry; nanometer scale alignment method; nanometer scale error; Adaptive optics; Mirrors; Optical distortion; Optical interferometry; Optical surface waves; Surface waves; Testing; concentric; interferometry; nanometer scale;
Conference_Titel :
Nanoelectronics Conference (INEC), 2011 IEEE 4th International
Conference_Location :
Tao-Yuan
Print_ISBN :
978-1-4577-0379-9
Electronic_ISBN :
2159-3523
DOI :
10.1109/INEC.2011.5991621
