DocumentCode
286094
Title
Novel pulsed laser deposition of thin films
Author
Tyrrell, G.C. ; Boyd, I.W.
Author_Institution
Univ. Coll. London, UK
fYear
1993
fDate
34078
Firstpage
42461
Lastpage
42463
Abstract
The authors briefly introduce and review the subject, indicating both advantages and less desirable effects associated with the technique. The application towards the growth of dielectric buffer layers suitable for superconducting films interfaced with crystalline silicon (c-Si) is described, as well as the use of multilayered methods to prepare BiSrCaCuO and PbSrYCaCuO superconducting structures. In addition, reactive growth of TiN, obtained by ablating Ti metal in N2 is summarised. Finally, preliminary investigations on the nature of the kinetic energy distribution and mass composition of the laser ablation plasma are described
Keywords
insulating thin films; pulsed laser deposition; superconducting thin films; BiSrCaCuO; HTSC films; PbSrYCaCuO; TiN; dielectric buffer layers; kinetic energy distribution; laser ablation plasma; mass composition; multilayered methods; pulsed laser deposition; reactive growth; superconducting films; thin films;
fLanguage
English
Publisher
iet
Conference_Titel
Laser Applications, IEE Colloquium on
Conference_Location
London
Type
conf
Filename
231099
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