Title :
Synthesis of cobalt metal nanowire arrays and the interfacial reactions of cobalt nanowires on (001)Si
Author :
Cheng, S.L. ; Wei, Y.P. ; Chung, C.H.
Author_Institution :
Dept. of Chem. & Mater. Eng., Nat. Central Univ., Chungli, Taiwan
Abstract :
In this study, we report the successful synthesis of large-scale, well-aligned pure cobalt metal nanowire arrays by using the electrodeposition in conjunction with anodic aluminum oxide (AAO) templates technique, and the investigation of the interfacial reactions between the produced Co metal nanowires and (001)Si substrate after different heat treatments. The morphologies, crystal structures, and compositions of the as-synthesized Co nanowires and the Co silicide nanostructures obtained after annealing at various temperatures were systematically investigated by SEM, TEM, and electron diffraction analyses.
Keywords :
anodisation; cobalt; crystal morphology; electrodeposition; electron diffraction; heat treatment; nanofabrication; nanowires; scanning electron microscopy; semiconductor-metal boundaries; transmission electron microscopy; (001)Si substrate; AAO template technique; Co-Si; SEM; Si; TEM; annealing; anodic aluminum oxide templates technique; crystal structure; electrodeposition; electron diffraction analyses; heat treatment; interfacial reaction; metal nanowire array synthesis; morphology; nanostructure; Annealing; Cobalt; Fabrication; Nanoscale devices; Silicides; Substrates; Co Nanowires; Co silicides; SEM and TEM; anodic alumina oxide; electrodeposition; interfacial reaction;
Conference_Titel :
Nanoelectronics Conference (INEC), 2011 IEEE 4th International
Conference_Location :
Tao-Yuan
Print_ISBN :
978-1-4577-0379-9
Electronic_ISBN :
2159-3523
DOI :
10.1109/INEC.2011.5991646