DocumentCode
2861018
Title
Synthesis of cobalt metal nanowire arrays and the interfacial reactions of cobalt nanowires on (001)Si
Author
Cheng, S.L. ; Wei, Y.P. ; Chung, C.H.
Author_Institution
Dept. of Chem. & Mater. Eng., Nat. Central Univ., Chungli, Taiwan
fYear
2011
fDate
21-24 June 2011
Firstpage
1
Lastpage
2
Abstract
In this study, we report the successful synthesis of large-scale, well-aligned pure cobalt metal nanowire arrays by using the electrodeposition in conjunction with anodic aluminum oxide (AAO) templates technique, and the investigation of the interfacial reactions between the produced Co metal nanowires and (001)Si substrate after different heat treatments. The morphologies, crystal structures, and compositions of the as-synthesized Co nanowires and the Co silicide nanostructures obtained after annealing at various temperatures were systematically investigated by SEM, TEM, and electron diffraction analyses.
Keywords
anodisation; cobalt; crystal morphology; electrodeposition; electron diffraction; heat treatment; nanofabrication; nanowires; scanning electron microscopy; semiconductor-metal boundaries; transmission electron microscopy; (001)Si substrate; AAO template technique; Co-Si; SEM; Si; TEM; annealing; anodic aluminum oxide templates technique; crystal structure; electrodeposition; electron diffraction analyses; heat treatment; interfacial reaction; metal nanowire array synthesis; morphology; nanostructure; Annealing; Cobalt; Fabrication; Nanoscale devices; Silicides; Substrates; Co Nanowires; Co silicides; SEM and TEM; anodic alumina oxide; electrodeposition; interfacial reaction;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanoelectronics Conference (INEC), 2011 IEEE 4th International
Conference_Location
Tao-Yuan
ISSN
2159-3523
Print_ISBN
978-1-4577-0379-9
Electronic_ISBN
2159-3523
Type
conf
DOI
10.1109/INEC.2011.5991646
Filename
5991646
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