• DocumentCode
    2861018
  • Title

    Synthesis of cobalt metal nanowire arrays and the interfacial reactions of cobalt nanowires on (001)Si

  • Author

    Cheng, S.L. ; Wei, Y.P. ; Chung, C.H.

  • Author_Institution
    Dept. of Chem. & Mater. Eng., Nat. Central Univ., Chungli, Taiwan
  • fYear
    2011
  • fDate
    21-24 June 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    In this study, we report the successful synthesis of large-scale, well-aligned pure cobalt metal nanowire arrays by using the electrodeposition in conjunction with anodic aluminum oxide (AAO) templates technique, and the investigation of the interfacial reactions between the produced Co metal nanowires and (001)Si substrate after different heat treatments. The morphologies, crystal structures, and compositions of the as-synthesized Co nanowires and the Co silicide nanostructures obtained after annealing at various temperatures were systematically investigated by SEM, TEM, and electron diffraction analyses.
  • Keywords
    anodisation; cobalt; crystal morphology; electrodeposition; electron diffraction; heat treatment; nanofabrication; nanowires; scanning electron microscopy; semiconductor-metal boundaries; transmission electron microscopy; (001)Si substrate; AAO template technique; Co-Si; SEM; Si; TEM; annealing; anodic aluminum oxide templates technique; crystal structure; electrodeposition; electron diffraction analyses; heat treatment; interfacial reaction; metal nanowire array synthesis; morphology; nanostructure; Annealing; Cobalt; Fabrication; Nanoscale devices; Silicides; Substrates; Co Nanowires; Co silicides; SEM and TEM; anodic alumina oxide; electrodeposition; interfacial reaction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanoelectronics Conference (INEC), 2011 IEEE 4th International
  • Conference_Location
    Tao-Yuan
  • ISSN
    2159-3523
  • Print_ISBN
    978-1-4577-0379-9
  • Electronic_ISBN
    2159-3523
  • Type

    conf

  • DOI
    10.1109/INEC.2011.5991646
  • Filename
    5991646