Title :
A micromachined diaphragm structure for integrated ultrasound transducers
Author :
Mo, J.-H. ; Robinson, A.L. ; Fitting, D.W. ; Terry, F.L., Jr. ; Carson, P.L.
Author_Institution :
Solid State Electron. Lab., Michigan Univ., Ann Arbor, MI, USA
Abstract :
A diaphragm structure for integrated ultrasound transducers based on micromachining of Si is presented. This device significantly reduces a large parasitic capacitance compared to a nonmicromachined structure, improving transducer sensitivity and minimum detectable signal. It also reduces acoustical crosstalk between transducer elements. Micromachined transducer elements are also shown to be less directive in an array, an indication of crosstalk reduction
Keywords :
ultrasonic transducers; Si micromachining; acoustical crosstalk; diaphragm structure; integrated ultrasound transducers; minimum detectable signal; parasitic capacitance; transducer sensitivity; Acoustic propagation; Acoustic transducers; Crosstalk; Dielectric substrates; Electrodes; Fabrication; Parasitic capacitance; Silicon; Ultrasonic imaging; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 1989. Proceedings., IEEE 1989
Conference_Location :
Montreal, Que.
DOI :
10.1109/ULTSYM.1989.67097
