Title :
Low-temperature wafer-scale fabrication of carbon nanotube network TFT: Geometry effect and transport mechanism
Author :
Chang, Hsiao-Yu ; Tsui, Bing-Yue
Author_Institution :
Dept. of Electron. Eng., Nat. Chiao-Tung Univ., Hsinchu, Taiwan
Abstract :
In this work, we propose a simple method to form uniform carbon nanotube network (CNTN) in wafer-scale, which is completely compatible to thin-film transistors (TFTs) process and can achieve large-area uniformity and stable device performance. From the plot of on-current versus off-current, it is clear that devices with various dimensions are divided into two groups, and the threshold value for these two groups was determined by device dimension compared to the length of CNT. The transport mechanisms of the CNTN TFTs of on-state and off-state identified by temperature-dependent measurement are thermal emission and band-to-band tunneling, respectively.
Keywords :
carbon nanotubes; chemical vapour deposition; thin film transistors; wafer-scale integration; C; band-to-band tunneling; carbon nanotube network TFT; geometry effect; low-temperature wafer-scale fabrication; temperature-dependent measurement; thermal emission; thin-film transistors; transport mechanism; Aluminum oxide; Carbon nanotubes; Current measurement; Temperature; Temperature measurement; Thin film transistors; Tunneling; CNT; TFT; carbon nanotube; thin film transistor;
Conference_Titel :
Nanoelectronics Conference (INEC), 2011 IEEE 4th International
Conference_Location :
Tao-Yuan
Print_ISBN :
978-1-4577-0379-9
Electronic_ISBN :
2159-3523
DOI :
10.1109/INEC.2011.5991666