• DocumentCode
    2861359
  • Title

    Loss characterization and surface passivation in silicon microphotonics

  • Author

    Borselli, Matthew ; Johnson, Thomas J. ; Painter, Oskar

  • Author_Institution
    Dept. of Appl. Phys., California Inst. of Technol., Pasadena, CA
  • fYear
    2006
  • fDate
    21-26 May 2006
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    High-quality factor (Q~1-5times106) microresonators are used to probe the optical properties of silicon-on-insulator surfaces with 0.04% monolayer sensitivity. A rapid and accurate measurement of linear and nonlinear absorption is utilized to assess new surface-passivation techniques.
  • Keywords
    elemental semiconductors; micro-optics; micromechanical resonators; optical properties; passivation; silicon; silicon-on-insulator; Si; high quality factor; loss characterization; microresonators; nonlinear absorption; optical properties; silicon microphotonics; silicon-on-insulator surfaces; surface passivation; Absorption; Nonlinear optics; Optical losses; Optical modulation; Optical resonators; Optical sensors; Optical surface waves; Passivation; Silicon; Surface treatment; (190.4870) Thermo-optical effects; (230.5750) Resonators; (240.0240) Optics at surfaces;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
  • Conference_Location
    Long Beach, CA
  • Print_ISBN
    978-1-55752-813-1
  • Electronic_ISBN
    978-1-55752-813-1
  • Type

    conf

  • DOI
    10.1109/CLEO.2006.4627618
  • Filename
    4627618