CO2 laser wave front and beam metrology using Quadri-Wave Lateral Shearing Interferometry

Author

Velghe, Sabrina ; Boucher, William ; Brahmi, Djamel ; Wattellier, Benoit

Author_Institution

Phasics SA, XTEC, Palaiseau, France

fYear

2009

fDate

14-19 June 2009

Firstpage

1

Lastpage

1

Abstract

This work proposes a method based on quadri-wave lateral shearing interferometry (QWLSI) for CO₂ laser measurement. This technique allows complete field analysis of the laser and gives beam parameters such as M², waist position, beam size, and Strehl ratio or far field analysis. In addition, this study investigates the metrological features of the interferometer and presents further experimental analysis of a CO₂ laser.

Keywords

carbon compounds; gas lasers; laser beams; laser variables measurement; light interferometry; CO₂; CO₂ laser analysis; CO₂ laser measurement; CO₂ laser wave front; M² beam parameter; Strehl ratio; beam metrology; beam size; beam waist position; far field analysis; metrological features; quadriwave lateral shearing interferometry; Diffraction gratings; Interference; Laser beam cutting; Laser beams; Metrology; Optical interferometry; Optimized production technology; Power lasers; Shearing; Wavelength measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on

Conference_Location

Munich

Print_ISBN

978-1-4244-4079-5

Electronic_ISBN

978-1-4244-4080-1

Type

conf

DOI

10.1109/CLEOE-EQEC.2009.5196256

Filename

5196256