Title :
The complex nanostructure of P(VDF-TrFE) made by dual step hot-embossing
Author :
Wen, Juanjuan ; Shen, Zhenkui ; Fang, Jiangrong ; Lu, Bingrui ; Qiu, Zhijun ; Jiang, Anquan ; Liu, Ran ; Chen, Yifang
Author_Institution :
Dept. of Microelectron., Fudan Univ., Shanghai, China
Abstract :
In this work, complex 3D ferroelectric nanostructures on Poly(vinylidenefluoride-trifluoroethylene), P(VDF-TrFE), films have successfully been fabricated using a special hot-embossing process with two sequential shots on the same site with a grating template and a dot array template of the same periodicity at the same hot-embossing temperature. The nanostructures have been characterized with atomic force microscope (AFM), piezoresponse force microscope (PFM) and Fourier transformed infrared spectroscopy (FTIR). It is shown that sequential hot-embossing offers an effective way to fabricate complex 3D nanostructures of functional ferroelectric materials toward various applications.
Keywords :
Fourier transform spectra; atomic force microscopy; embossing; ferroelectric materials; infrared spectra; nanofabrication; nanostructured materials; organic compounds; scanning probe microscopy; thin films; 3D ferroelectric nanostructures; AFM; FTIR; Fourier transformed infrared spectroscopy; P(VDF-TrFE); atomic force microscopy; dot array template; dual step hot-embossing; films; grating template; piezoresponse force microscopy; poly(vinylidenefluoride-trifluoroethylene); Arrays; Embossing; Films; Gratings; Hysteresis; Nanobioscience; Three dimensional displays; P(VDF-TrFE); ferroelectric films; nanostructures; sequential hot-embossing;
Conference_Titel :
Nanoelectronics Conference (INEC), 2011 IEEE 4th International
Conference_Location :
Tao-Yuan
Print_ISBN :
978-1-4577-0379-9
Electronic_ISBN :
2159-3523
DOI :
10.1109/INEC.2011.5991673