Title :
Improved microelectronics manufacturing using new laser technologies
Author :
Swenson, Edward J.
Author_Institution :
Electro Sci. Ind., Inc., Portland, OR
Abstract :
The use of the 1.3 line and third harmonic of the diode pumped Nd:YAG laser provides a variety of new methods to address the continued advance towards smaller, lighter more complex microelectronics.
Keywords :
integrated circuit manufacture; neodymium; optical pumping; solid lasers; YAG:Nd; complex microelectronics; diode pumped laser; laser technologies; microelectronics manufacturing; solid laser; Ceramics; Laser beam cutting; Laser excitation; Laser transitions; Laser tuning; Manufacturing; Microelectronics; Production; Pump lasers; Resistors;
Conference_Titel :
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location :
Long Beach, CA
Print_ISBN :
978-1-55752-813-1
Electronic_ISBN :
978-1-55752-813-1
DOI :
10.1109/CLEO.2006.4627714
