DocumentCode :
2863385
Title :
Electrical properties of a single p-type ZnO nanowire by Ga implantation with FIB
Author :
Chu, Wen-Huei ; Liu, Chuan-Pu
Author_Institution :
Dept. of Mater. Sci. & Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
fYear :
2011
fDate :
21-24 June 2011
Firstpage :
1
Lastpage :
2
Abstract :
ZnO nanowires were implanted with Ga+ ions with a dose of 1012 cm-2 and a field effect transistor (FET) device with a single Ga-doped ZnO nanowire was fabricated in a combined scanning-electron-microscope/focused-ion-beam (SEM/FIB) system. Resistance measurements performed on a single Ga-doped ZnO nanowire show the ohmic contact behavior in current-voltage curves. Moreover, resistance roughly tends to decrease with the gate voltage changes from 1V to -6V, indicating the p-type behavior. The electrical activation energy for the hole carriers due to thermal activation is estimated to be ~229.5±2.8 meV.
Keywords :
III-V semiconductors; electric resistance measurement; field effect transistors; focused ion beam technology; gallium; nanowires; scanning electron microscopes; zinc compounds; FIB; Ga; ZnO; electrical activation energy; electrical properties; field effect transistor device; focused-ion-beam; hole carriers; ohmic contact behavior; resistance measurements; scanning-electron-microscope; single p-type nanowire; thermal activation; Doping; FETs; Logic gates; Nanoscale devices; Resistance; Semiconductor device measurement; Zinc oxide; Focus Ion Beam; Ga-doped ZnO; electrical property;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanoelectronics Conference (INEC), 2011 IEEE 4th International
Conference_Location :
Tao-Yuan
ISSN :
2159-3523
Print_ISBN :
978-1-4577-0379-9
Electronic_ISBN :
2159-3523
Type :
conf
DOI :
10.1109/INEC.2011.5991791
Filename :
5991791
Link To Document :
بازگشت