DocumentCode
2863496
Title
Ultrafast lasers for nano-material growth and processing
Author
Mao, Samuel S.
Author_Institution
Dept. of Mech. Eng. & Lawrence Berkeley Nat. Lab., Univ. of California, Berkeley, CA
fYear
2006
fDate
21-26 May 2006
Firstpage
1
Lastpage
2
Abstract
Laser ablation is a well-established solid-state film growth technique that typically involves applying a nanosecond laser beam to ablate a target material, followed by depositing the precursor vapor onto a substrate. A main technical obstacle for growing thin films with conventional nanosecond laser ablation is the formation of micron-sized particulates or droplets, which would be unacceptable for making materials with nanometer scale structures.
Keywords
high-speed optical techniques; laser ablation; nanotechnology; pulsed laser deposition; surface contamination; vapour deposited coatings; laser ablation; micron sized particulate formation; nanomaterial growth; nanomaterial processing; nanosecond laser beam; precursor vapor deposition; solid-state film growth technique; ultrafast laser; Free electron lasers; Interference; Laser ablation; Laser theory; Lattices; Optical materials; Optical pulses; Pulsed laser deposition; Solid lasers; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location
Long Beach, CA
Print_ISBN
978-1-55752-813-1
Electronic_ISBN
978-1-55752-813-1
Type
conf
DOI
10.1109/CLEO.2006.4627756
Filename
4627756
Link To Document