Title :
Femtosecond laser micromachined multiple-orifice two-dimensional ejector arrays for picoliter droplet ejection
Author :
Demirci, Utkan ; Ozcan, Aydogan
Author_Institution :
Bio-MEMS Resource Center, Shriners Burns Inst., Boston, MA
Abstract :
A femtosecond laser micromachined multi-orifice two-dimensional silicon-nitride membrane array is reported to generate picoliter droplets. This device uses a higher-order resonance ejection mechanism, increases the flow rate per membrane and can eject from various locations on a membrane.
Keywords :
laser beam machining; micromachining; femtosecond laser; micromachined; multiple orifice 2D ejector arrays; picoliter droplet ejection; Biomembranes; Hospitals; Micromachining; Optical arrays; Optical device fabrication; Orifices; Reservoirs; Resonance; Semiconductor laser arrays; Ultrafast optics; 230.4000 Microstructure fabrication; 350.3390 Laser materials processing;
Conference_Titel :
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location :
Long Beach, CA
Print_ISBN :
978-1-55752-813-1
Electronic_ISBN :
978-1-55752-813-1
DOI :
10.1109/CLEO.2006.4627757
