Title :
Deposition of Tungsten induced by femtosecond lasers
Author :
Tang, Mingzhen ; Zhang, Haitao ; McCoy, Jerry ; Her, Tsing-Hua
Author_Institution :
Dept. of Phys. & Opt., Univ. of North Carolina at Charlotte, Charlotte, NC
Abstract :
We demonstrate Tungsten deposition on transparent substrates by 400-nm femtosecond-pulsed laser at room temperature. Deposition as functions of laser power, exposure time, and substrates was characterized. We found strong substrate dependence with circularly polarized light.
Keywords :
chemical vapour deposition; high-speed optical techniques; light polarisation; pulsed laser deposition; substrates; tungsten; W; exposure time; femtosecond-pulsed laser deposition; laser polarization; laser power; multiphoton-absorption induced laser chemical vapor deposition; temperature 293 K to 298 K; transparent substrates; tungsten deposition; wavelength 400 nm; Chemical lasers; Laser ablation; Laser mode locking; Optical polarization; Power lasers; Pulsed laser deposition; Scanning electron microscopy; Silicon compounds; Tungsten; Ultrafast optics; (220.4000) Microstructure fabrication; (350.3390) Laser materials processing;
Conference_Titel :
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location :
Long Beach, CA
Print_ISBN :
978-1-55752-813-1
Electronic_ISBN :
978-1-55752-813-1
DOI :
10.1109/CLEO.2006.4627760
