Title :
Effects of post annealing temperatures on the properties of Sr0.6Ba0.4Nb2O6 thin films
Author :
Yang, Cheng-Fu ; Kuo, Chin-Guo ; Sun, Tai-Ping ; Wu, Sung-Mao ; Chen, Wen- Ray
Author_Institution :
Dept. of Chem. & Mater. Eng., Nat. Univ. of Kaohsiung, Kaohsiung, Taiwan
Abstract :
Sr0.6Ba0.4Nb2O6 (SBN) thin films were deposited using radio frequency (RF) magnetron sputtering method and post annealing in a conventional furnace. The annealing process had improved the crystallization and also had large influences on the crystalline orientation. As the annealing temperature increased from 600°C to 700°C, the diffraction intensities of (410) and (001) planes increased. Annealed at 800°C, the SBN thin films showed highly c-axis crystalline orientation of (001) plane. The influences of annealing temperatures on the electrical characteristics of the polarization-applied electric field curves, the capacitance-voltage curves, and the leakage current density-electric field curves were investigated.
Keywords :
annealing; barium compounds; crystal orientation; crystallisation; ferroelectric thin films; leakage currents; sputter deposition; strontium compounds; SBN thin films; Sr0.6Ba0.4Nb2O6; annealing temperatures; c-axis crystalline orientation; capacitance-voltage curves; crystallization; diffraction intensities; electric field curves; furnace; leakage current density; polarization; radiofrequency magnetron sputtering; temperature 800 degC; Annealing; Capacitance; Diffraction; Electric fields; Leakage current; Substrates; Sr0.6Ba0.4Nb2O6; annealing; crystalline orientation;
Conference_Titel :
Nanoelectronics Conference (INEC), 2011 IEEE 4th International
Conference_Location :
Tao-Yuan
Print_ISBN :
978-1-4577-0379-9
Electronic_ISBN :
2159-3523
DOI :
10.1109/INEC.2011.5991811
