Title :
Observation of integrated circuits by optical-fiber-probe-coupled laser terahertz emission microscope
Author :
Inoue, Ryotaro ; Uchida, Naotsugu ; Tonouchi, Masayoshi
Author_Institution :
Inst. Laser Eng., Osaka Univ., Suita
Abstract :
Observation of integrated circuits by the optical-fiber-probe-coupled laser terahertz emission microscope (LTEM) system is reported. The LTEM image of an operational amplifier active in a circuit is obtained with a spatial resolution ~2 mum.
Keywords :
fibre lasers; integrated optoelectronics; operational amplifiers; terahertz waves; LTEM image; integrated circuits; operational amplifier; optical fiber probe coupled laser; terahertz emission microscope; Fiber nonlinear optics; Integrated optics; Optical microscopy; Optical modulation; Optical pulses; Optical pumping; Photonic integrated circuits; Pulse amplifiers; Stimulated emission; Ultrafast optics; (060.2350) Fiber optics imaging; (120.4290) Nondestructive testing; (320.7110) Ultrafast nonlinear optics;
Conference_Titel :
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location :
Long Beach, CA
Print_ISBN :
978-1-55752-813-1
Electronic_ISBN :
978-1-55752-813-1
DOI :
10.1109/CLEO.2006.4627811
