Research on Thermal Characteristic in Slow-Small Temperature Changing for MEMS Linear Vibration Gyroscope

Silicon-MEMS gyroscope is an important part of MEMS (micro electrical mechanical system). There are some disturbances ignored in traditional macro gyroscope that must be evaluated newly because of its smaller size (reaching the level of micron). In these disturbances, the temperature changing largely influences the performance of MEMS gyroscope. The temperature influence include static, dynamic and momentary characteristic. The static characteristic means that the temperature is changed slowly. It influences the size of the configuration and the elastomeric modulus of the material. This paper analyzes the static characteristic only. There are several kinds of MEMS gyroscopes now. In this paper, a MEMS linear vibration gyroscope is researched. The changing of the configuration of the gyroscope due to temperature changing is analyzed using Matlab. And the relationship between the amplitude and phase of the measure-axis and the temperature is derived also through analyzing the influence of temperature on material flexible modulus